SEMI S7 -评估人员和评估公司资格的安全指南 SEMI S7- SAFETY GUIDELINE FOR EVALUATION PERSONNEL AND EVALUATING COMPANY QUALIFICATIONS
一. 定义
1. 认可实验室：政府或监管机构认可的有能力根据既定安全标准进行评估的专业的器件，设备或系统检测独立机构。
accredited testing laboratory ATL — an independent organization dedicated to the testing of components, devices, or systems that is recognized by a governmental or regulatory body as competent to perform evaluations based on established safety standards.
2. 评估人员：评估机构的代表，参与制造设备的评估的人员
evaluation personnel — personnel (e.g., employees or subcontractors) who, as agents of the evaluating company, participate in the evaluation of manufacturing equipment.
3. 评估公司：检查ME设备的机构，并确定设备是否符合SEMI的文件的标准。
evaluating company — the party examining ME and making a finding as to whether the ME conforms to the criteria of a SEMI ‘S’ Document.
